Reactor for coating particles in stationary chamber with rotating paddles and gas injection

A reactor for coating particles, comprising:

• a stationary vacuum chamber to hold a bed of particles to be coated, the chamber having a lower portion that forms a half-cylinder and an upper portion;
• a vacuum port in the upper portion of the chamber;
• a paddle assembly including a rotatable drive shaft extending along an axial axis of the half-cylinder and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by a motor orbits the plurality of paddles about the drive shaft inside the vacuum chamber;
• and
• a gas injection assembly including
• a first plurality of apertures arranged in a first row and extending through a wall of the lower portion of the stationary vacuum chamber and to an inner surface of the half-cylinder to inject a first reactant or precursor gas into the lower portion of the vacuum chamber,
• a second plurality of apertures arranged in a second row parallel to and vertically offset from the first row and extending through the wall of the lower portion of the stationary vacuum chamber and to the inner surface of the half-cylinder to inject a second reactant or precursor gas into the lower portion of the vacuum chamber.