Cooling device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A cooling device for use in semiconductor manufacturing,

• a tank;
• a first path including a pump and a heat exchanger, wherein a liquid-phase refrigerant is circulated through the first path by the pump so that the liquid-phase refrigerant is extracted from the tank and returned to the tank, the heat exchanger cooling the liquid-phase refrigerant in the first path;
• a second path branched from the first path;
• a detector configured to detect an internal pressure of the tank;
• and
• a controller configured to control the heat exchanger based on an output from the detector,
• wherein the second path includes a heater configured to heat the liquid-phase refrigerant supplied from the first path, a throttle configured to decrease a pressure of the refrigerant heated by the heater such that the pressure of the refrigerant approaches a saturated vapor pressure of the refrigerant, and a vaporizer configured to vaporize, by heat from a cooling target, at least part of the refrigerant having passed through the throttle, and the refrigerant having passed through the throttle being returned to the tank,
• wherein a gas does not condense in the tank,
• wherein a partial pressure of the gas in the tank is higher than a difference between a vapor pressure of the refrigerant returned to the tank and a vapor pressure of the refrigerant in the tank,
• wherein the tank includes a member, disposed within, and separate from, walls of the tank, having a sectional area larger than a horizontal sectional area in the tank, and
• wherein the member is arranged to contact a liquid-phase refrigerant in the tank and the refrigerant returned from the second path.