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US 12,679,772 B2Granted
Ceramic component and method of manufacturing ceramic component
AssigneeSolmics Co., Ltd.
InventorsSungsic Hwang, Junrok Oh, Kyoungyeol Min, Kyungin Kim, Jungkun Kang, Younguk Han
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Abstract
The present disclosure relates to a ceramic component including a boron carbide, wherein a difference of a first residual stress measured at a first spot on a surface of the ceramic component and a second residual stress measured at a second spot on the surface having different distance from a center of the surface than the first spot is −600 to +600 MPa.
Claims11
A ceramic component comprising:
- a boron carbide material;
- and
- a surface having a first spot and a second spot having a different distance from a center of the surface,
- wherein the ceramic component comprises a focus ring of a plasma etching equipment,
- wherein the ceramic component comprises boron and carbon in an amount of 90 mol % or more, and
- wherein a difference between a first residual stress measured at the first spot and a second residual stress measured at the second is −600 to +600 MPa, such that etching resistance and impact resistance of the focus ring are increased.
3 more elements
A focus ring of a plasma etching equipment, the focus ring comprising:
- a boron carbide material;
- a main body having a first height from a reference plane and a main body residual stress measured on an upper surface of the main body;
- and
- a mounting body having a second height from the reference plane and a mounting body residual stress measured on an upper surface of the mounting body,
- wherein the upper surface of the main body is etched by plasma and an etching target is mounted on the upper surface of the mounting body, and
- wherein a difference between the main body residual stress and the mounting body residual stress is within 40% of an average of the main body residual stress and the mounting body residual stress, such that the etching resistance and impact resistance of the focus ring are increased.
3 more elements
Dependencies are inferred from the claim text.