Ultrapure water production system
AssigneeOrgano Corporation
InventorsKyohei Tsutano, Fumitaka Ichihara, Fumio Sudo
Life of this patent
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Abstract
An ultrapure water production system capable of producing ultrapure water from which fine particles have been highly removed and supplying the ultrapure water to a point of use is equipped with at least an ultrafiltration membrane device, and includes: a first organic porous ion exchanger provided at a position downstream of the ultrafiltration membrane device in an ultrapure water supply line for supplying the ultrapure water to the point of use; and a microfiltration membrane device provided, in the ultrapure water supply line, at a position downstream of the first organic porous ion exchanger.
Claims11
An ultrapure water production system comprising:
- a first monolithic organic porous ion exchanger provided at a position downstream of an ultrafiltration membrane device, in an ultrapure water supply line that is connected to a point of use and that supplies the point of use with ultrapure water;
- and
- a microfiltration membrane device provided, in the ultrapure water supply line, at a position downstream of the first monolithic organic porous ion exchanger,
- wherein the first monolithic organic porous ion exchanger is inserted into an interior of a pipe in a state of pressing against an inner wall of the pipe in a direction of expansion.
An ultrapure water production system comprising:
- a first monolithic organic porous ion exchanger provided, in an ultrapure water supply line that is connected to a point of use and that supplies the point of use with ultrapure water, at a position between an ultrafiltration membrane device and a pump which is provided at a position upstream of the ultrafiltration membrane device;
- and
- a microfiltration membrane device provided, in the ultrapure water supply line, at a position downstream of the ultrafiltration membrane device,
- wherein the first monolithic organic porous ion exchanger is inserted into an interior of a pipe in a state of pressing against an inner wall of the pipe in a direction of expansion.
Dependencies are inferred from the claim text.