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US 12,679,721 B2Granted
Micromechanical device comprising a hydrogen drainage layer
AssigneeRobert Bosch GmbH
InventorsJohannes Boy, Leo Rizzi
Life of this patent
Estimating the term…
Abstract
A micromechanical device. The device includes a MEMS chip which comprises a cavity; an IC chip which includes an IC substrate and at least one IC functional layer, wherein the IC chip is connected to the MEMS chip such that the IC functional layer is disposed between the IC substrate and the cavity. The IC chip includes a hydrogen drainage layer which is disposed between the IC functional layer and the cavity.
Claims4
A micromechanical device, comprising:
- a MEMS chip which includes a cavity;
- an IC chip which includes an IC substrate and at least one IC functional layer, wherein the IC chip is connected to the MEMS chip such that the IC functional layer is disposed between the IC substrate and the cavity;
- wherein the IC chip includes a hydrogen drainage layer which is disposed between the IC functional layer and the cavity, and wherein the hydrogen drainage layer is configured to discharge hydrogen to outside the device.
Dependencies are inferred from the claim text.