Active energy emission device
AssigneeHamamatsu Photonics K.K.
InventorsKyoichi Murayama, Keita Umeno
Life of this patent
Estimating the term…
Abstract
An active energy irradiation device includes: a plurality of active energy irradiation units; a housing that houses the active energy irradiation units; an exhaust unit that is provided in the housing, and that discharges air to an outside of the housing; and an inert gas suction unit that suctions an inert gas outside the housing, and that allows the inert gas to flow into the housing, wherein an air flow path allowing the air to flow through, and an inert gas flow path allowing the inert gas to flow through are provided inside the housing, the air flow path and the inert gas flow path merge with each other, and the exhaust unit exhausts the inert gas together with the air.
Claims11
An active energy irradiation device comprising:
- a plurality of active energy irradiation units arranged at least along a predetermined direction;
- a housing that houses the active energy irradiation units;
- an exhaust unit that is provided in the housing, and that discharges air to an outside of the housing;
- an inert gas suction unit that suctions an inert gas from the outside of the housing, the inert gas suction unit including a suction port that allows the inert gas to flow from the suction port into the housing;
- an air-cooled heatsink housed inside the housing and thermally connected to the active energy irradiation units;
- an air flow path including a flow path from an intake unit to the exhaust unit, the air flow path allowing the air to flow through;
- and
- an inert gas flow path including a flow path from the inert gas suction unit to the exhaust unit, the inert gas flow path allowing the inert gas to flow through,
- wherein the air flow path and the inert gas flow path are provided inside the housing,
- the air flow path and the inert gas flow path merge with each other,
- the air flow path and the inert gas flow path pass through the heatsink, and
- the exhaust unit exhausts the inert gas together with the air.
Dependencies are inferred from the claim text.