System and method for transferring substrate

A substrate transfer system, comprising:

• a robot transportation device that transfers at least one substrate using at least one swing-movable transport arm;
• a compensatory rotation device that is mounted on the at least one swing-movable transport arm of the robot transportation device, and selectively supports the at least one substrate and enables compensatory rotation thereof so that, even when the at least one swing-movable transport arm is in a swing motion while the at least one substrate is transferred by the robot transportation device, a direction of the at least one substrate or an order of the at least one substrate is maintained;
• and
• a control unit that applies a swing motion control signal to the robot transportation device and also a compensatory rotation control signal to the compensatory rotation device,
• wherein the compensatory rotation device includes:
• a rotational swing deck that supports the at least one substrate and is rotatably mounted;
• a swing deck lifting device that moves up and down the rotational swing deck from a first height lower than the at least one swing-movable transport arm to a second height higher than the at least one swing-movable transport arm;
• a swing deck rotating device that rotates the rotational swing deck lifted to the second height;
• a roll wheel that is mounted on the at least one swing-movable transport arm of the robot transportation device and is in rolling contact with a bottom surface of the at least one substrate;
• and
• a wheel rotating device that rotates the roll wheel so that the roll wheel can rotate the at least one substrate in a self-rotational direction of the at least one substrate,
• wherein the rotational swing deck includes:
• a main body connected to the swing deck lifting device or the swing deck rotating device;
• an extending part mounted to be extendable from the main body;
• and
• an extension device to extend the extending part,
• wherein the extending part is a foldable rotary arm to be folded to and then unfolded from the main body,
• wherein the foldable rotary arm includes:
• a first rotating arm that is unfolded in a first direction based on the main body;
• and
• a second rotating arm that is unfolded to a second direction, opposite to the first direction, based on the main body,
• wherein a first support pin is formed on the main body,
• a second support pin is formed on the first rotating arm,
• a third support pin is formed on the second rotating arm, so as to support the at least one substrate at three points or more, and
• wherein the control unit controls a compensatory rotation rate of the compensatory rotation device based on a swing motion rate of the robot transportation device so that, when the robot transportation device is in the swing motion, the direction of the at least one substrate is constantly maintained to thus prevent rotational shock applied to the at least one substrate.