Nozzle gasket and nozzle structure for purge load port
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-Lung Wu, Yang-Ann Chu, Hsu-Shui Liu, Jiun-Rong Pai
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-Lung Wu, Yang-Ann Chu, Hsu-Shui Liu, Jiun-Rong Pai
Estimating the term…
A plurality of purge nozzles of a purge load port include a nozzle gasket and a nozzle structure to inject a purging fluid into and through an internal chamber of a container (e.g., a FOUP) that is configured to, in operation, transport wafers or workpieces between various locations within a FAB. The nozzle gasket includes a deformable structure that abuts against a surface of a nozzle structure and a sealing structure opposite to the deformable structure that forms a seal between the container and the nozzle gasket. A nozzle hole of a nozzle of the nozzle structure includes a threaded region or portion that is configured to receive a threaded stopper structure to seal off the nozzle hole.
A nozzle gasket, comprising:
A purge load port, comprising:
A nozzle gasket, comprising:
Dependencies are inferred from the claim text.