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AssigneeApplied Materials, Inc.
InventorsRajkumar Thanu, Pei-Chen Wu, William Laceky, Matvey Farber, Jeffrey C. Hudgens
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Disclosed herein are embodiments of an electrostatic end effector, and methods of manufacturing the same. In one embodiment, an electrostatic end effector comprises a ceramic base, a first electrode layer coupled to the ceramic base, and a second electrode layer coupled to the ceramic base. The electrostatic end effector is configured to generate an electrostatic force upon a substrate responsive to a voltage applied to the first electrode. The electrostatic force upon the substrate may increase the friction force upon the substrate which may allow the end effector to accelerate at faster rates than current technologies allow without the substrate slipping on the end effector.
An electrostatic end effector comprising:
A method of manufacturing an electrostatic end effector, the method comprising:
A method of manufacturing an electrostatic end effector, the method comprising:
Dependencies are inferred from the claim text.