Substrate processing apparatus
AssigneeSemes Co., Ltd.
InventorsSang Min Lee, Jong Doo Lee, Ju Yeon Song
Life of this patent
Estimating the term…
Abstract
Disclosed is a manufacturing method of a semiconductor device. The manufacturing method may include: a closing operation of seating a substrate on a support member provided in a chamber, and closing the chamber to seal a treating space provided by the chamber; a clamping operation of clamping the chamber by moving a clamping body in a direction facing the chamber after the closing operation; a close-contact operation of making the chamber be in contact with the clamping body after the clamping operation; and a substrate processing operation of drying the substrate by supplying supercritical fluid into the treating space.
Claims16
An apparatus for processing a substrate, the apparatus comprising:
- a chamber defining a treating space in which a substrate is processed, wherein the chamber includes a first chamber body provided with a support member for supporting the substrate, and a second chamber body that is coupled with the first chamber body to define a treating space in which the substrate is processed;
- a moving unit for moving any one of the first chamber body and the second chamber body;
- a clamping body for clamping the chamber;
- a moving module for moving the clamping body between a clamping position for clamping the chamber and an unclamping position for unclamping the chamber;
- and
- a controller configured to control the moving unit and the moving module,
- wherein the controller is configured to control the moving unit such that one of the first chamber body or the second chamber body is in contact with the clamping body when the first chamber body and the second chamber body are in a closed position for sealing the treating space, that the other of the first chamber body or the second chamber body has a gap with and is separated from the clamping body when the first chamber body and the second chamber body are in the closed position for sealing the treating space, and that the clamping body is in the clamping position.
Dependencies are inferred from the claim text.