Ultraviolet light emitting diode and manufacturing method therefor
AssigneeXiamen San'an Optoelectronics Co., Ltd.
InventorsGong Chen, Yashu Zang, Jianbin Chen, Bin Jiang, Chung-Ying Chang, Shao-Hua Huang
Life of this patent
Estimating the term…
Loading patent…
AssigneeXiamen San'an Optoelectronics Co., Ltd.
InventorsGong Chen, Yashu Zang, Jianbin Chen, Bin Jiang, Chung-Ying Chang, Shao-Hua Huang
Estimating the term…
Provided are an ultraviolet light emitting diode (LED) and a manufacturing method thereof. The manufacturing method includes: providing an LED wafer including a substrate and a semiconductor stacked layer, the semiconductor stacked layer has a lower surface and an upper surface, the semiconductor stacked layer includes a first semiconductor layer, a light emitting layer and a second semiconductor layer; focusing a first laser beam and a second laser beam into the substrate, a focusing position of the first laser beam is closer to the lower surface than that of the second laser beam, the first laser beam is focused to form at least one first laser cutting line, laser scratches of each first laser cutting line are quasi-circular, and the at least one first laser cutting line includes a laser cutting line closest to the lower surface; and separating the LED wafer to form LED chips.
An ultraviolet light emitting diode, comprising:
An ultraviolet light emitting diode, comprising a substrate and a semiconductor stacked layer disposed on the substrate;
Dependencies are inferred from the claim text.