Solidly-mounted transversely-excited bulk acoustic resonator split ladder filter

A filter device, comprising:

• a first chip comprising:
• a first interdigital transducer (IDT) of a first resonator on a surface of a first piezoelectric layer, wherein the first resonator is a first type of resonator comprising a solidly-mounted resonator, and
• an acoustic reflector sandwiched between the first piezoelectric layer and a first base;
• a second chip comprising:
• a second IDT of a second resonator on a surface of a second piezoelectric layer, wherein the second resonator is a second type of resonator different from the first type;
• and
• a circuit card interconnecting the first chip and the second chip, wherein the circuit card includes an electrical connection between the first IDT of the first chip and the second IDT of the second chip.

A filter device comprising:

• a first chip comprising:
• a first interdigital transducer (IDT) of a first resonator on a surface of a first piezoelectric layer, wherein the first resonator is a transversely excited solidly-mounted resonator, and
• an acoustic reflector sandwiched between the first piezoelectric layer and a first base;
• a second chip comprising:
• a second IDT of a second resonator on a surface of a second piezoelectric layer, wherein the second resonator is a floating-diaphragm transversely excited resonator;
• and
• an electrical connection between the first IDT and the second IDT.