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US 12,676,592 B2Granted
Piezoelectric vibration element having conductive etch stop, piezoelectric vibrator, and piezoelectric oscillator
AssigneeMurata Manufacturing Co., Ltd.
InventorsTadayuki Okawa, Toshio Nishimura
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Abstract
A piezoelectric vibration element that includes a piezoelectric piece having a first principal surface and a second principal surface; a via electrode penetrating the piezoelectric piece from the first principal surface to the second principal surface thereof; a conductive etch stop film covering the via electrode on the second principal surface; and a wiring electrode covering at least part of an outer edge of the conductive etch stop film on the second principal surface.
Claims19
A piezoelectric vibration element comprising:
- a piezoelectric piece having a first principal surface and a second principal surface;
- a via electrode penetrating the piezoelectric piece from the first principal surface to the second principal surface thereof;
- a conductive etch stop film covering the via electrode on the second principal surface;
- and
- a wiring electrode covering at least part of an outer edge of the conductive etch stop film on the second principal surface.
2 more elements
Dependencies are inferred from the claim text.