Electronic device manufacturing method, laser device, and wavelength sequence calculation system

A laser device comprising:

• a laser oscillator capable of changing a center wavelength of pulse laser light;
• a laser amplifier capable of amplifying a pulse energy of the pulse laser light output from the laser oscillator and outputting the pulse laser light;
• and
• a processor configured to:
• acquire a pulse spectral shape of the pulse laser light, and a target integrated spectral shape to be realized by the pulse laser light of a plurality of pulses generated based on a wavelength sequence in which a center wavelength of the pulse laser light is periodically changed;
• calculate a plurality of target center wavelengths allocated to the plurality of pulses to realize the target integrated spectral shape, and a number of allocation pulses of each target center wavelength being the number of allocation pulses per cycle of the wavelength sequence, the target center wavelengths including at least one first center wavelength, the number of allocation pulses of which is 2 or greater, and at least one second center wavelength, the number of allocation pulses of which is 1;
• calculate the wavelength sequence by allocating the at least one first center wavelength, and then allocating the at least one second center wavelength;
• and
• control the laser oscillator based on the wavelength sequence,
• wherein the target center wavelengths are calculated based on an inverse Fourier transform of a third function obtained by dividing a Fourier transform of a second function representing the target integrated spectral shape by a Fourier transform of a first function representing the pulse spectral shape.

A wavelength sequence calculation system comprising:

• a non-transitory storage medium readable by a computer which stores a wavelength sequence calculation program;
• and
• a CPU,
• the CPU being configured to execute the wavelength sequence calculation program to:
• acquire a pulse spectral shape of pulse laser light, and a target integrated spectral shape to be realized by the pulse laser light of a plurality of pulses generated based on a wavelength sequence in which a center wavelength of the pulse laser light is periodically changed;
• calculate a plurality of target center wavelengths allocated to the plurality of pulses to realize the target integrated spectral shape, and a number of allocation pulses of each target center wavelength being the number of allocation pulses per cycle of the wavelength sequence, the target center wavelengths including at least one first center wavelength, the number of allocation pulses of which is 2 or greater, and at least one second center wavelength, the number of allocation pulses of which is 1;
• and
• calculate the wavelength sequence by allocating the at least one first center wavelength, and then allocating the at least one second center wavelength,
• wherein the target center wavelengths are calculated based on an inverse Fourier transform of a third function obtained by dividing a Fourier transform of a second function representing the target integrated spectral shape by a Fourier transform of a first function representing the pulse spectral shape.