Optical probe system for the electron microscope

A microscope system comprising:

• a charged particle beam microscope that includes a vacuum chamber;
• and
• an optical probe system comprising:
• an optical probe configured to be mounted to the charged particle beam microscope to permit an optical probe shaft of the optical probe to extend at least partially into the vacuum chamber of the charged particle beam microscope;
• a first optical channel extending through the optical probe shaft, wherein the first optical channel accommodates a portion of a segmented optical axis extending between a distal end of the probe and an optical chassis providing a high magnification view of a sample;
• and
• a second optical channel extending through the optical probe shaft, wherein the second optical channel accommodates an unsegmented optical axis extending between the distal end of the probe and an eyepiece or camera that provides a low magnification view of the sample, and wherein:
• the segmented optical axis includes at least a first segment that substantially parallel to the unsegmented optical axis and at least a second segment that is not substantially parallel to the unsegmented optical axis,
• the first segment of the segmented optical axis and the unsegmented optical axis are positioned within the optical probe shaft to permit the first optical channel and the second optical channel to simultaneously address a sample mounted within the vacuum chamber,
• the first optical channel is configured to transmit and receive light, and
• the second optical channel is configured to transmit and receive light,
• wherein the first optical channel and second optical channel are separate optical channels.