Coating and developing device

A substrate transfer method of a coating and developing device, comprising:

• a front end module robot being installed in the front end module taking the substrate from the front end module and transferring the substrate to the process station;
• a coating robot being installed in the coating unit of the process station transferring the substrate to the coating unit, and performing coating treatment and heating treatment to the substrate in the coating unit;
• the coating robot taking the substrate out of the coating unit after the substrate has been processed in the coating unit;
• the side robot transferring the substrate taken from the coating unit to the mobile conveying part;
• the mobile conveying part transferring the substrate to the interface station after the substrate has been processed in the coating unit;
• an interface robot being installed in the interface station, the interface robot taking the substrate from the mobile conveying part and transferring the substrate to the interface station after the substrate has been processed in the coating unit, or another side robot taking the substrate from the mobile conveying part after the substrate has been processed in the coating unit, and then the interface robot transferring the substrate to the interface station;
• the interface robot taking the substrate from the interface station and transferring the substrate to the process station after the substrate has completed of exposure processing;
• a developing robot being installed in the developing unit of the process station, the developing robot transferring the substrate to the developing unit, and performing developing treatment and heating treatment to the substrate in the developing unit, wherein the coating unit and the developing unit are arranged in a straight line;
• the developing robot taking the substrate from the developing unit after the substrate has been processed in the developing unit;
• the side robot transferring the substrate to the mobile conveying part after the substrate is taken out of the developing unit;
• the mobile conveying part transferring the substrate to the front end module after the substrate has been processed in the developing unit;
• the front end module robot taking the substrate from the mobile conveying part and transferring the substrate to the front end module after the substrate has been processed in the developing unit, or another side robot taking the substrate from the mobile conveying part after the substrate has been processed in the developing unit, and then the front end module robot transferring the substrate to the front end module.