Flow cells and methods for making the same

A method, comprising:

• imprinting a resin layer of a multi-layer stack to form a multi-height convex region including a first region with a first height and a second region with a second height that is smaller than the first height, wherein the multi-layer stack includes the resin layer over a sacrificial layer over a transparent substrate;
• selectively etching portions of the multi-layer stack around the multi-height convex region to expose a portion of the transparent substrate;
• utilizing the multi-layer stack to develop a curable layer through the transparent substrate to define a cured layer over the exposed portion of the transparent substrate;
• simultaneously etching i) the multi-height convex region to remove the resin layer and a portion of the sacrificial layer underlying the second region of the multi-height convex region, thereby exposing a second portion of the transparent substrate and whereby a third portion of the transparent substrate remains covered by a remaining portion of the sacrificial layer, and ii) the cured layer such that it is substantially co-planar with the remaining portion of the sacrificial layer, thereby forming a depression extending to the second portion of the transparent substrate;
• and
• utilizing the remaining portion of the sacrificial layer to define first and second functionalized layers over different regions of the depression.