Strip-shaped composite material for probe needles
AssigneeHeraeus Deutschland GmbH & Co. KG
InventorsJonas Fecher, Marc Schumann
Life of this patent
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Abstract
A strip-shaped sandwich composite material for producing probe needles, wherein an inner core layer is arranged between two outer cover layers, wherein the inner core layer consists of a palladium alloy comprising at least 30 wt. % palladium or of a platinum alloy comprising at least 30 wt. % platinum, and wherein the two outer cover layers consist of a precipitation-hardened and/or dispersion-hardened copper alloy comprising at least 90 wt. % copper and/or silver alloy comprising at least 70 wt. % silver. The invention also relates to a probe needle, a bonding strip, a probe needle array and a method for producing a composite material.
Claims19
A composite material for producing probe needles for electronic testing of semiconductor elements, wherein the composite material is strip-shaped and is delimited by two mutually parallel main surfaces, wherein the composite material is layered perpendicularly to the parallel main surfaces and has a sandwich construction comprising an inner core layer and two outer cover layers, wherein the inner core layer is arranged between the two outer cover layers, and the inner core layer is firmly connected on two opposite sides to the two outer cover layers, wherein the two outer cover layers form the parallel main surfaces, wherein the inner core layer consists of a palladium alloy comprising at least 30 wt. % palladium or of a platinum alloy comprising at least 30 wt. % platinum, and wherein the two outer cover layers consist of a precipitation-hardened and/or dispersion-hardened copper alloy comprising at least 90 wt. % copper, or of a precipitation-hardened and/or dispersion-hardened silver alloy comprising at least 70 wt. % silver, or of a precipitation-hardened and/or dispersion-hardened copper alloy comprising at least 90 wt. % copper and of a precipitation-hardened and/or dispersion-hardened silver alloy comprising at least 70 wt. % silver.
A method for producing a composite material made of two metal alloys, wherein the composite material is suitable and provided for the production of probe needles for the electronic testing of semiconductor elements and wherein the method is characterized by the following chronologically successive steps:
- A) providing a first strip of a palladium alloy comprising at least 30 wt. % palladium or of a platinum alloy comprising at least 30 wt. % platinum, and a second strip of a precipitation-hardened and/or dispersion-hardened copper alloy comprising at least 90 wt. % copper or of a precipitation-hardened and/or dispersion-hardened silver alloy comprising at least 70 wt. % silver, and a third strip of a precipitation-hardened and/or dispersion-hardened copper alloy comprising at least 90 wt. % copper, or of a precipitation-hardened and/or dispersion-hardened silver alloy comprising at least 70 wt. % silver,
- B) arranging the first strip between the second strip and the third strip, and placing the first strip against the second strip and against the third strip, and
- C) connecting the first strip to the second strip and the third strip by roll bonding the strips placed against one another, the roll bonding producing a continuous strip-shaped composite material from the materials of the first strip, the second strip and the third strip.
Dependencies are inferred from the claim text.