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US 12,674,775 B2Granted
Non-reagent chloride analysis in acid copper plating baths
AssigneeKLA Corporation
InventorsJingjing Wang, Patrick Saitta, Eugene Shalyt
Life of this patent
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Abstract
The disclosed subject matter relates to techniques for methods and systems for non-reagent chloride analysis in an acid copper plating bath, using a blend of VMS (Virgin Makeup Solution) to generate Ag+-containing solution as a titration into a sample.
Claims10
A method for non reagent chloride analysis in an acid copper plating bath, comprising:
- adding a blend solution including VMS (Virgin Makeup Solution) into an acid copper plating bath including Cl, and generating an anodic dissolution of an Ag electrode into the plating bath, thereby generating an Ag+-containing solution in an Ag+-containing solution generation cell separate from a titration cell;
- transferring, via a pump, adding the generated Ag+-containing solution as a silver titrant from the Ag+-containing solution generation cell into an electrolyte including an analysis sample in the titration cell;
- and
- analyzing chloride concentration in the sample, via measuring at least one working electrode (WE) potential in a predetermined potential range.
1 more element
An electrochemical system for non reagent chloride analysis in acid Cu plating bath, comprising:
- an Ag+-containing solution generation unit, comprising:
- a potentiostat;
- an Ag+-containing solution generation cell including an acid copper plating bath;
- an Ag anode and a cathode connected to the potentiostat;
- and
- a VMS vessel and a DIW vessel, configured to deliver a blend solution of VMS and DIW into the Ag+-containing solution generation cell,
- a titration unit, comprising:
- a titrator,
- a titration cell containing an Ag ISE (ion selective electrode) and a stirrer, connecting the titrator and the titration cell, and
- a sample vessel and a DIW vessel, configured to deliver a sample solution into the titration cell,
- and
- a pump delivering the Ag-containing solution from the Ag+-containing solution generation cell to the titration cell.
9 more elements
Dependencies are inferred from the claim text.