Micro-electro-mechanical device
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLoïc Joet, Patrice Rey
Life of this patent
Estimating the term…
Abstract
A micro-electromechanical device includes a frame; a proof mass connected to the frame through a first mechanical link which allows pivoting of the proof mass to relative to the frame about a first axis of rotation parallel to a mean plane of the frame; and a lever for detecting pivoting of the mass, connected to the proof mass through a second mechanical link allowing rotation of the lever relative to the proof mass about a second axis. The second link includes two walls connecting perpendicularly to each other, one to the lever and the other to the proof mass, one of the walls being parallel to the second axis of rotation.
Claims11
A microelectromechanical device comprising:
- a first frame,
- a first proof mass, connected to the first frame through a first mechanical link which allows pivoting of the first proof mass to relative to the first frame about a first axis of rotation parallel to a mean plane of the first frame, and
- a lever for detecting pivoting of the first proof mass, connected to the first proof mass through a second mechanical link allowing rotation of the lever relative to the first proof mass about a second axis parallel to the first axis,
- wherein the second mechanical link comprises:
- a first wall, perpendicular or substantially perpendicular to the second axis of rotation, and
- a second wall, perpendicular to the mean plane of the frame and in parallel or substantially in parallel to the second axis of rotation,
- the first wall and the second wall connecting to each other perpendicularly or substantially perpendicularly, the first wall connecting to the lever and the second wall connecting to the first proof mass,
- wherein the device further comprises:
- a second frame,
- a second proof mass, connected to the second frame through a first additional link which allows pivoting of the second proof mass relative to the second frame about a first additional axis of rotation, parallel to the first axis of rotation, and wherein the second proof mass is also connected to the detection lever through a second additional link allowing rotation of the lever relative to the second proof mass about a second additional axis of rotation parallel to the first axis of rotation,
- the lever being connected on one side to the first proof mass and on the other side to the second proof mass.
Dependencies are inferred from the claim text.