Compact drive and sense balanced multi-axis gyroscope

A method of assembling a microelectromechanical system (MEMS) gyroscope, comprising:

• providing a drive system configured to impart a drive motion on a plurality of proof masses within a device plane of the MEMS gyroscope;
• installing a first in-plane proof mass of the plurality of proof masses, wherein the first in-plane proof mass is operably coupled to the drive system to oscillate along a first axis in the device plane in response to the drive motion, wherein the first in-plane proof mass moves out of plane in response to an angular velocity about a second axis within the plane and that is perpendicular to the first axis;
• installing a second in-plane proof mass of the plurality of proof masses, wherein the second in-plane proof mass is operably coupled to the drive system to oscillate in anti-phase to the first in-plane proof mass in response to the drive motion, wherein the second in-plane proof mass moves out-of-plane in anti-phase to the first in-plane proof mass in response to the angular velocity about the second axis;
• installing a first out-of-plane proof mass and a second out-of-plane proof mass, wherein the first out-of-plane proof mass comprises:
• a first driven mass operably coupled to the drive system via the first in-plane proof mass to oscillate along an axis parallel to the first axis in the device plane in response to the drive motion, wherein the first driven mass moves in the device plane perpendicular to the first axis in response to an angular velocity about an out-of-plane axis;
• and
• a first sense mass coupled to the first driven mass such that the first sense mass does not move in the device plane in response to the drive motion and to translate perpendicular to the first axis based on movement of the first driven mass in response to the angular velocity about the out-of-plane axis;
• and
• wherein the second out-of-plane proof mass comprises:
• a second driven mass operably coupled to the drive system via the second in-plane proof mass to oscillate in anti-phase to the first driven mass in the device plane in response to the drive motion, wherein the second driven mass moves in the device plane perpendicular to the first axis in anti-phase to the first driven mass in response to the angular velocity about the out-of-plane axis;
• and
• a second sense mass coupled to the second driven mass such that the second sense mass does not move in the device plane in response to the drive motion and to translate perpendicular to the first axis in anti-phase to the first sense mass based on the movement of the first driven mass in response to the angular velocity about the out-of-plane axis;
• and
• connecting the first sense mass to the second sense mass with a coupling link configured to synchronize anti-phase translation of the first sense mass and the second sense mass.