Vacuum valve
AssigneePfeiffer Vacuum Technology AG
InventorsJeff Hadley, Angel Huerta, David Crone, Randy Regennitter, Kinte Allen
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AssigneePfeiffer Vacuum Technology AG
InventorsJeff Hadley, Angel Huerta, David Crone, Randy Regennitter, Kinte Allen
Estimating the term…
A vacuum valve for a medium-, high- and/or ultra-high vacuum system comprises a valve housing defining a passage connecting a first opening and a second opening of the valve housing, a valve body and a complementary seat, the valve body comprising a valve shaft extending in an axial direction and being actuable to move the valve body between an open position and a closed position, wherein the valve body cooperates with the seat in the closed position so as to close the passage gas-tightly, and a locking unit configured to secure the valve body in a locked position, wherein the locking unit comprises a locking mechanism configured to urge, upon actuation of the locking unit, at least one locking element in a radial direction disposed in a plane perpendicular to the axial direction towards the valve shaft to assume a locking position.
A vacuum valve for a medium-, high-and/or ultra-high vacuum system, the vacuum valve comprising:
A vacuum valve for a medium-, high-and/or ultra-high vacuum system, the vacuum valve comprising:
Dependencies are inferred from the claim text.