Substrate joined body
AssigneeCanon Kabushiki Kaisha
InventorsTaichi Yonemoto, Yoshiyuki Fukumoto, Atsunori Terasaki
Life of this patent
Estimating the term…
Abstract
A substrate joined body including: a first substrate; a second substrate; an organic film that comprises silicon and carbon and joins the first substrate and the second substrate; and a protective film that comprises an inorganic element and is formed over the organic film from at least a part of the surface of the first substrate and at least a part of the surface of the second substrate, wherein the protective film comprises a region in which the ratio of carbon to silicon based on atomic percentage is from 0.0 to 5.0 in a region within 50 nm in a thickness direction from a surface of the organic film on the protective film side, when the surface is measured by X-ray photoelectron spectroscopy.
Claims19
A liquid discharge head that discharges a liquid, the liquid discharge head comprising:
- a first substrate comprising a first flow path and an opening of the first flow path on one side of the first substrate;
- and
- a second substrate comprising a second flow path and an opening of the second flow path on one side of the second substrate,
- wherein the one side of the first substrate and the one side of the second substrate face each other,
- wherein a diameter of the opening of the first flow path is larger than a diameter of the opening of the second flow path,
- wherein an adhesive is disposed on a corner formed by an inner surface of the first flow path and the one side of the second substrate,
- wherein a continuous protective film is formed over the inner surface of the first flow path, the adhesive, and the one side of the second substrate, and
- wherein the adhesive disposed on the corner has a circular arc shape.
A liquid discharge head that discharges a liquid, the liquid discharge head comprising:
- a first substrate comprising a first flow path and an opening of the first flow path on one side of the first substrate;
- and
- a second substrate comprising a second flow path and an opening of the second flow path on one side of the second substrate,
- wherein the one side of the first substrate and the one side of the second substrate face each other,
- wherein a diameter of the opening of the first flow path is larger than a diameter of the opening of the second flow path,
- wherein an adhesive is disposed on a corner formed by an inner surface of the first flow path and the one side of the second substrate,
- wherein a continuous protective film is formed over the inner surface of the first flow path, the adhesive, and the one side of the second substrate, and
- wherein the protective film is not formed on the one side of the first substrate.
A liquid discharge head that discharges a liquid, the liquid discharge head comprising:
- a first substrate comprising a first flow path and an opening of the first flow path on one side of the first substrate;
- and
- a second substrate comprising a second flow path and an opening of the second flow path on one side of the second substrate,
- wherein the one side of the first substrate and the one side of the second substrate face each other,
- wherein a diameter of the opening of the first flow path is larger than a diameter of the opening of the second flow path,
- wherein an adhesive is disposed on a corner formed by an inner surface of the first flow path and the one side of the second substrate,
- wherein a continuous protective film is formed over the inner surface of the first flow path, the adhesive, and the one side of the second substrate, and
- wherein an amount of an inorganic element in the protective film is from 25 to 75% by mass.
Dependencies are inferred from the claim text.