Alloy microstructure formation for chamber components

A method comprising:

• printing a first portion of a chamber component for a process chamber using a three dimensional printer, wherein the first portion of the chamber component comprises a first aluminum alloy composition having a first grain size of about 1 μm to about 100 μm;
• printing a second portion of the chamber component using the three dimensional printer, wherein the second portion of the chamber comprises a second aluminum alloy composition having a second grain size of about 0.5 nm to about 20 μm,
• wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition;
• and
• printing an oxidation layer on the second portion of the chamber component, wherein the oxidation layer comprises aluminum and magnesium in combination with at least one of boron (B), carbon (C), titanium (Ti), or a combination thereof.