Micro light emitting diode with metasurface reflectors
AssigneeIntel Corporation
InventorsKhaled Ahmed, Joshua Fryman, Junyi Qiu, Mozhgan Mansuri, James Jaussi
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Abstract
A micro-LED includes a light emitter between a pair of reflective metasurfaces formed from nanostructures. The metasurfaces have different levels of reflectivity, with one metasurface reflecting nearly all light, and the other metasurface allowing some light to pass through. The reflections of the light within the micro-LED result in an improved radiation recombination rate, which results in an increased modulation speed. In addition, the light emitted from the micro-LED has a relatively narrow divergence angle and narrow emission linewidth, making the micro-LED suitable for optical communications.
Claims20
A device comprising:
- a first dielectric layer comprising a first plurality of discrete dielectric structures, at least a first portion of the first plurality of discrete dielectric structures arranged at a first pitch;
- a second dielectric layer comprising a second plurality of discrete dielectric structures, at least a second portion of the second plurality of discrete dielectric structures arranged at a second pitch, wherein the first pitch is greater than the second pitch;
- and
- a layer of light-emitting material between the first dielectric layer and the second dielectric layer.
An apparatus comprising:
- a first layer comprising a first plurality of dielectric structures across at least a portion of the first layer, an adjacent pair of the first plurality of dielectric structures having a first pitch;
- a second layer over the first layer, the second layer comprising a transparent conductor;
- a third layer over the second layer, the third layer comprising indium, gallium and nitrogen;
- and
- a fourth layer comprising a second plurality of dielectric structures across at least a portion of the fourth layer, an adjacent pair of the second plurality of dielectric structures having a second pitch less than the first pitch.
An assembly comprising:
- a die;
- and
- a plurality of optical transmitters coupled to the die, one of the optical transmitters comprising a micro-light emitting diode (micro-LED), the micro-LED comprising:
- a first layer comprising a first plurality of dielectric structures, an adjacent pair of the first plurality of dielectric structures having a first pitch;
- a second layer comprising a second plurality of dielectric structures, an adjacent pair of the second plurality of dielectric structures having a second pitch less than the first pitch;
- and
- a third layer between the first layer and the second layer, the third layer comprising a light-emitting material.
Dependencies are inferred from the claim text.