Surface acoustic wave device
OwnerMichio Kadota, Shuji Tanaka +1inventors
InventorsMichio Kadota, Shuji Tanaka, Hiroyuki Nakamura
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Abstract
Surface acoustic wave device for providing resonance of a surface acoustic wave having a wavelength λ can include a substrate and a piezoelectric layer implemented over the substrate to have a thickness greater than 2λ. The surface acoustic wave device can further include an interdigital transducer electrode formed over the piezoelectric layer to have mass density and thickness selected to provide a tuned mass-loading property for the thickness of the piezoelectric layer.
Claims19
A surface acoustic wave device for providing resonance of a surface acoustic wave having a wavelength λ, comprising:
- a substrate;
- a piezoelectric layer formed from LiTaO3 or LiNbO3 and disposed over the substrate, the piezoelectric layer having a thickness greater than or equal to 2λ;
- and
- an interdigital transducer electrode formed over the piezoelectric layer, the interdigital transducer electrode having a mass density ρ greater than 1.50 g/cm3 and a thickness greater than 0.036λ.
A method for manufacturing a surface acoustic wave device that provides resonance of a surface acoustic wave having a wavelength λ, the method comprising:
- forming or providing a substrate;
- implementing a piezoelectric layer formed from LiTaO3 or LiNbO3 to be over the substrate, such that the piezoelectric layer has a thickness greater than or equal to 2λ;
- and
- forming an interdigital transducer electrode over the piezoelectric plate, such that the interdigital transducer electrode has a mass density ρ greater than 1.50 g/cm3 and a thickness greater than 0.036λ.
Dependencies are inferred from the claim text.