Mask inspection apparatus with a platform module
OwnerMing-Sheng Cheninventor
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Abstract
A mask inspection machine includes a platform unit for carrying a transparent container. The transparent container includes a lower window and an upper window. The platform unit includes a platform and a carrier. The platform includes a slot. The carrier is movable on the platform along the slot. The carrier includes a plate and guiding elements. The plate includes a support face including an inspection window corresponding to the lower window of the transparent container. The guiding elements are connected to the support face for guiding the transparent container onto the support face.
Claims14
A platform unit of a mask inspection machine for carrying a transparent container formed with a lower window and an upper window, the platform unit comprising:
- a platform comprising a slot;
- and
- a carrier movable on the platform along the slot, wherein the carrier comprising
- a plate comprising a support face comprising an inspection window corresponding to the lower window of the transparent container;
- and
- guiding elements connected to the support face for guiding the transparent container onto the support face.
Dependencies are inferred from the claim text.