EUV multi-mirror arrangement

An extreme ultraviolet (EUV) multi-mirror arrangement, comprising:

• a carrier structure;
• a multiplicity of mirror units supported by the carrier structure,
• wherein:
• the mirror units are disposed one next to another in a grid arrangement;
• each mirror unit comprises a base element and, opposite the base element, an individually tiltable mirror element;
• each individually tiltable mirror element comprises a mirror substrate comprising a face which faces away from the base element and which supports a reflection coating defining a mirror surface configured to reflect radiation;
• between its base element and its mirror element, each mirror unit comprises:
• components of a suspension system configured to movably mount the mirror element on the base element;
• actuators of an actuator system configured to produce movements of the mirror element relative to the base element in response to receiving control signals;
• and sensors of a sensor system configured to capture the position of the mirror elements;
• the actuator system comprises piezoelectric actuators;
• and
• the sensor system comprises capacitive sensors, and
• wherein:
• a piezoelectric actuator comprises a multilayer structure comprising a piezoelectric layer and a further layer;
• the piezoelectric actuator has a first side and a second side opposite the first side;
• the first side supports a first electrode layer configured to produce an electrical field penetrating the piezoelectric layer in a thickness direction;
• the second side supports a second electrode layer configured to produce an electric field penetrating the piezoelectric layer in the thickness direction;
• and
• the piezoelectric layer is configured so that, when an electrical voltage is applied to the first and second electrode layers, the piezoelectric layer contracts in a direction perpendicular to the thickness direction to bend the multilayer structure;
• the suspension system comprises first and second connection element groups;
• each of the first and second connection element groups comprises first and second integrated, independently controllable piezoelectric actuators having mutually orthogonal rotary actuation axes;
• and
• each of the first and second connection groups comprises:
• a base linking element fixedly linked with the base element;
• a first piezoelectric actuator comprising a first end and a second end opposite the first end, the first end attached with the base linking element;
• a flexurally stiff connection element attached with the second end of the first piezoelectric actuator;
• and
• a second piezoelectric actuator comprising first and second ends, the first end of the second piezoelectric actuator opposite the second end of the second piezoelectric actuator, the first end of the second piezoelectric actuator attached with the flexurally stiff connection element, and the second end of the second piezoelectric actuator attached with a mirror linking element which is fixedly connected to the mirror element.

An extreme ultraviolet (EUV) multi-mirror arrangement, comprising:

• a carrier structure;
• a multiplicity of mirror units supported by the carrier structure,
• wherein:
• the mirror units are disposed one next to another in a grid arrangement;
• each mirror unit comprises a base element and, opposite the base element, an individually tiltable mirror element;
• each individually tiltable mirror element comprises a mirror substrate comprising a face which faces away from the base element and which supports a reflection coating defining a mirror surface configured to reflect radiation;
• between its base element and its mirror element, each mirror unit comprises:
• components of a suspension system configured to movably mount the mirror element on the base element;
• actuators of an actuator system configured to produce movements of the mirror element relative to the base element in response to receiving control signals;
• and sensors of a sensor system configured to capture the position of the mirror elements;
• the actuator system comprises piezoelectric actuators;
• and
• the sensor system comprises capacitive sensors,
• wherein:
• a piezoelectric actuator comprises a multilayer structure comprising a piezoelectric layer and a further layer;
• the piezoelectric actuator has a first side and a second side opposite the first side;
• the first side supports a first electrode layer configured to produce an electrical field penetrating the piezoelectric layer in a thickness direction;
• the second side supports a second electrode layer configured to produce an electric field penetrating the piezoelectric layer in the thickness direction;
• the piezoelectric layer is configured so that, when an electrical voltage is applied to the first and second electrode layers, the piezoelectric layer contracts in a direction perpendicular to the thickness direction to bend the multilayer structure;
• and
• the piezoelectric actuator comprises a mirror-side end portion is connected to the mirror element via a rigid link.