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US 12,669,723 B2Granted
Embedded radio frequency shield between integrated optical modulator and silicon substrate
AssigneeCisco Technology, Inc.
InventorsLong Chen, Qianfan Xu, Li Chen, Mark A. Webster
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Abstract
A device and a method of fabricating the device are provided. The device includes an optical modulator formed in a dielectric material, a silicon substrate adjacent the dielectric material, and a metal shield formed in the dielectric material between the optical modulator and the silicon substrate. The metal shield blocks an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate.
Claims20
A method comprising:
- fabricating a first wafer, the first wafer including an optical modulator formed in a dielectric material, the optical modulator including a silicon diode electrically coupled to a plurality of electrodes;
- fabricating a second wafer, the second wafer including a metal shield formed in the dielectric material on top of a silicon substrate, wherein the metal shield is a floating metal shield that includes a plurality of metal bars placed in a transverse direction of an electrode propagation direction of the optical modulator with a certain pitch;
- inverting the first wafer to form an inverted first wafer;
- and
- bonding the inverted first wafer to the second wafer such that the metal shield is positioned between the plurality of electrodes of the optical modulator and the silicon substrate.
2 more elements
A method comprising:
- providing an optical modulator in a first layer of dielectric material;
- providing a silicon substrate adjacent the first layer of dielectric material;
- and
- providing a floating metal shield in a second layer of dielectric material between the optical modulator and the silicon substrate, the floating metal shield blocking an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate, the floating metal shield including a plurality of metal bars positioned in a transverse direction of the driving signal with a certain pitch.
1 more element
Dependencies are inferred from the claim text.