Defect detection module

A defect detection module comprising a signal emitting module, a transmitting electrode, a receiving electrode, and a signal processing module;

• wherein;
• the signal emitting module generates a first signal;
• the receiving electrode spaced apart from the transmitting electrode;
• a substrate comprising glass, silicon, or a combination thereof, the substrate having a through hole, a partially through hole or a non-through hole formed therein;
• a medium disposed within the through hole or the non-through hole and between the transmitting electrode and the receiving electrode, the medium including air, the substrate material, or a combination thereof;
• wherein the first signal is capacitively coupled from the transmitting electrode, through the medium, to the receiving electrode to generate a second signal;
• wherein:
• the transmitting electrode, the medium and the receiving electrode have an equivalent capacitance;
• and
• the signal processing module which processes and optimizes the second signal to obtain a detection result by discriminating a defect within the medium based on differences in dielectric properties of the medium;
• and the defect is detected without physical contact between the transmitting electrode, the receiving electrode, and the medium.