High-speed automatic film-foreign substance detection apparatus

A high-speed automatic film-foreign substance detection apparatus, comprising:

• a stage on which a sample is mounted;
• a plurality of side light units arranged on an upper side surface of the stage to irradiate side light toward the sample;
• a low-magnification optical module installed at an upper side of the stage and generating a low-magnification image by capturing the sample so that a foreign substance is detected from the sample using light scattering of the foreign substance by the side light irradiated from the plurality of side light units;
• a high-magnification optical module installed at one side of the stage, having a high-magnification driving unit installed and connected thereto to drive in directions of an x-axis, a y-axis and a z-axis, and generating a high-magnification image by capturing the sample;
• and
• a user device for controlling the operation of the low-magnification optical module and the high-magnification optical module, and receiving, storing, playing and analyzing the low-magnification image and the high-magnification image,
• wherein the user device derives a foreign substance coordinate area where the foreign substance is detected in the low-magnification image, controls the high-magnification optical module to move to an adjacent coordinate area having no foreign substance adjacent to the foreign substance coordinate area so that the high-magnification optical module continuously captures the high-magnification image while moving in the z-axis direction by a certain number in the adjacent coordinate area, compares an optical characteristic value extracted from the captured high-magnification image with a reference value range of an upper end surface of the sample, determines a height of the high-magnification optical module as a reference surface when the optical characteristic value corresponds to the reference value range of the upper end surface of the sample, allows the high-magnification optical module to move horizontally from the adjacent coordinate area to the foreign substance coordinate area along the reference surface, and then allows the high-magnification optical module to continuously capture the high-magnification image while descending in the z-axis direction by a certain number from the reference surface in the foreign substance coordinate area, compares the optical characteristic value extracted from the captured high-magnification image with a foreign substance reference value range, and determines the distance that the high-magnification optical module descends from the reference surface when the optical characteristic value corresponds to the foreign substance reference value range as a depth of the foreign substance.