Apparatus and method for sensing RF signals from RF plasma processing equipment
AssigneeApplied Materials, Inc.
InventorsMichael Hopkins, Paul Scullin, JJ Lennon, Thomas Gilmore
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Abstract
A sensing device for monitoring electromagnetic radiation emanating from a plasma processing system. The sensing device may, for example, comprise at least two of a first probe for detecting a time varying RF electric field, a second probe for detecting a time varying RF magnetic field, and an optical probe for detecting the modulated light emission. The sensing device may, for example, further comprise a signal processing unit configured to receive a signal from each probe and to monitor the electromagnetic radiation with respect to only a single frequency of each signal.
Claims18
A sensing device for monitoring electromagnetic radiation emanating from a plasma processing system comprising at least two of:
- (i) a first probe for detecting a time varying RF electric field;
- (ii) a second probe for detecting a time varying RF magnetic field;
- and
- (iii) an optical probe for detecting the modulated light emission;
- and the sensing device further comprising:
- a signal processing unit configured to receive a signal from each probe, monitor the electromagnetic radiation with respect to only a single frequency of each signal, continuously determine the amplitude of each signal from each probe to produce amplitude data, and analyse the amplitude data to determine a changing average amplitude according to a high speed detection mode, wherein the high speed detection mode enabling pulse profile monitoring without the need for synchronisation with a TTL signal.
A sensing device for monitoring electromagnetic radiation emanating from a plasma processing system comprising at least two of:
- (i) a first probe for detecting a time varying RF electric field;
- (ii) a second probe for detecting a time varying RF magnetic field;
- and
- (iii) an optical probe for detecting the modulated light emission;
- and the sensing device further comprising:
- a signal processing unit configured to receive a signal from each probe, monitor the electromagnetic radiation with respect to only a single frequency of each signal, continuously determine the amplitude of each signal from each probe to produce amplitude data, analyse the amplitude data to determine a changing average amplitude according to a high speed detection mode, and identify a high speed event based on the analysis of the amplitude data according to the high speed detection mode, the high speed event including a RF arc event or an RF pulse event.
Dependencies are inferred from the claim text.