Pump and method of manufacturing a sealing
AssigneePfeiffer Vacuum Technology AG
InventorsBernd Koci, Jonas Becker, Sebastian Latta
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Abstract
The present invention relates to a pump, in particular a vacuum pump, comprising a pump-active component having a coating, wherein the coating comprises an oxide layer, which is in particular formed by anodic oxidation in an acidic electrolyte and which has pores, and a fluorine-free polymer-based and/or sol-gel-based sealing, and wherein the pores of the oxide layer are at least partly covered by the sealing and/or impregnated with the sealing and/or filled with the sealing. The present invention further relates to a method of sealing a porous oxide layer.
Claims21
A method of coating a pump-active component of a pump, comprising the following steps:
- Step A) providing the pump-active component composed of a light metal workpiece and having a porous oxide layer on a surface,
- Step B) exposing the pump-active component to a negative pressure,
- Step C) contacting the porous oxide layer with a solution comprising at least one polymerizable sealing precursor and/or at least one sol-gel-based sealing precursor,
- wherein a voltage is applied to the pump-active part during at least one of the steps A) to C).
The method in accordance with wherein the sealing precursor is polymerized in the pore of the porous oxide layer.
A pump comprising a pump-active component, the pump active component having been formed in by a method comprising the following steps:
- Step A) providing the pump-active component composed of a light metal workpiece and having a porous oxide layer on a surface,
- Step B) exposing the pump-active component to a negative pressure,
- Step C) contacting the porous oxide layer with a solution comprising at least one polymerizable sealing precursor and/or at least one sol-gel-based sealing precursor,
- wherein a voltage is applied to the pump-active part during at least one of the steps A) to C).
Dependencies are inferred from the claim text.