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US 12,668,877 B2Granted
Uniform deposition
AssigneePicosun Oy
InventorsTimo Malinen, Juhana Kostamo, Marko Pudas
Life of this patent
Estimating the term…
Abstract
A reaction chamber of a substrate processing apparatus contains a reaction space. At least three lateral chemical inlets point towards a centre area of the reaction space each from different directions, each of the at least three lateral chemical inlets providing an individually closable route for a first precursor chemical to the reaction space.
Claims27
A method, comprising:
- providing a reaction chamber with a reaction space in a substrate processing apparatus;
- providing a non-rotatable substrate holder configured to carry a substrate;
- providing at least three lateral precursor chemical inlets pointing towards a centre area of the reaction space each from different directions, each of the at least three lateral precursor chemical inlets providing an individually closable route for a first precursor chemical to the reaction space;
- and
- providing respective in-feed tubes extending to respective ones of the precursor chemical inlets, which are individually closable, said individually closable precursor chemical inlets being configured to discharge the first precursor chemical into the reaction space from sides of the reaction chamber.
2 more elements
An apparatus, comprising:
- a reaction chamber with a reaction space;
- a non-rotatable substrate holder configured to carry a substrate;
- and
- at least three lateral precursor chemical inlets pointing towards a centre area of the reaction space each from different directions, each of the at least three lateral precursor chemical inlets providing an individually closable route for a first precursor chemical to the reaction space,
- the apparatus comprising respective in-feed tubes extending to respective ones of the precursor chemical inlets, which are individually closable, said individually closable precursor chemical inlets being configured to discharge the first precursor chemical into the reaction space from sides of the reaction chamber.
2 more elements
Dependencies are inferred from the claim text.