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US 12,668,603 B2Granted
Functionalized organotin precursors and related methods
AssigneeEntegris, Inc.
InventorsDavid M. Ermert, Thomas M. Cameron, Claudia Fafard
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Abstract
Precursors useful in the formation of tin-containing films are provided. The precursors comprise a functionalized tin compound in which one or more ligands are coordinated to Sn, and the Sn is functionalized with at least one functional group. Methods for forming the precursors and methods for forming tin-containing films using the precursors are further provided.
Claims4
A composition comprising:
- a precursor of the formula:
- where:
- R is (CH2)n—Si(CH3)3 with n=0 to 3;
- and
- L1, L2, and L3 are each independently an amide, an acetylide, a carbamate, or a carboxylate.
2 more elements
Dependencies are inferred from the claim text.