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US 12,668,533 B2Granted
Apparatus and method to form ultrafine features on glass
AssigneeIndustry-Academic Cooperation Foundation, Yonsei University
InventorsShinill Kang, Runjia Han, Donghyun Kim, Sunmok Kwon, Jeehyeon Lee
Life of this patent
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Abstract
The present invention relates to a method and apparatus for forming ultrafine features on a glass surface. The method and apparatus for forming ultrafine features on a glass surface are configured to directly pressurize a mold with a transmission unit or to pressurize the mold with a fluid using the transmission unit, so the mold may pressurize the glass surface with a uniform force.
Claims3
An apparatus forming ultrafine features on a glass surface, the apparatus comprising:
- a lower support part;
- a glass that is disposed above the lower support part;
- a mold that is made of a transparent material covering an upper surface of the glass through which an infrared laser is transmitted;
- a transmission unit that is made of a transparent material covering an upper surface of the mold through which an infrared laser is transmitted;
- an upper support part that is coupled to an outer periphery of the transmission unit to support the transmission unit;
- and
- a laser irradiation unit that irradiates an infrared laser to an upper portion of the transmission unit,
- wherein the lower support part pressurizes the glass upward so that the upper surface of the glass is pressurized by the mold,
- wherein the lower support part includes a third heating unit that heats the lower support part, and the upper support part includes a fourth heating unit that heats the upper support part, and
- wherein the transmission unit is formed to be depressed upward so that the transmission unit is flattened during pressurizing the mold, so the upper surface of the mold is pressurized with a uniform force.
7 more elements
Dependencies are inferred from the claim text.