Polycrystalline silicon rod and process of manufacturing polycrystalline silicon rod

A process of manufacturing a polycrystalline silicon rod in which polycrystalline silicon is deposited on a silicon core wire with a Siemens method,

• the process comprising manufacturing the polycrystalline silicon rod such that a temperature difference AT in a cross-section of the polycrystalline silicon rod is at 200° C. or less over an hour or more before a deposition of polycrystalline silicon is completed,
• wherein an absolute value of a difference between compressive stress and tensile stress in residual stress in the longitudinal direction on a circumferential surface of the polycrystalline silicon rod is 22 MPa or less.