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US 12,666,732 B2Granted
Microbolometer systems and methods
AssigneeTeledyne FLIR, LLC
InventorsEric A. Kurth, Marin Sigurdson, Robert F. Cannata, James L. Dale, Christopher Chan
Life of this patent
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Abstract
Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.
Claims20
An infrared imaging device comprising:
- a substrate comprising a plurality of contacts and a surface, wherein the surface defines a plane;
- and
- a microbolometer array coupled to the substrate, wherein the microbolometer array comprises a plurality of microbolometers, and wherein each microbolometer comprises:
- a bridge;
- and
- a leg structure coupled to the bridge and to one of the plurality of contacts, wherein the leg structure comprises a first segment having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane, wherein the first dimension is less than the second dimension, wherein the first segment comprises at least a portion of a first metal layer and at least a portion of a first layer formed on a first side of the first metal layer, wherein a cross-section of the leg structure has a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section, and wherein the first segment is associated with the third section.
3 more elements
An infrared imaging device comprising:
- a substrate comprising a plurality of contacts and a surface, wherein the surface defines a plane;
- and
- a microbolometer array coupled to the substrate, wherein the microbolometer array comprises a plurality of microbolometers, and wherein each microbolometer comprises:
- a bridge;
- and
- a leg structure coupled to the bridge and to one of the plurality of contacts, wherein the leg structure comprises a first segment having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane, wherein the first dimension is less than the second dimension, and wherein the first segment comprises at least a portion of a first metal layer and at least a portion of a first layer formed on a first side of the first metal layer, wherein:
- the portion of the first metal layer comprises a first portion of the first metal layer;
- the portion of the first layer comprises a first portion of the first layer;
- the second direction is substantially perpendicular to the plane;
- the leg structure further comprises a second segment adjacent to the first segment, wherein the second segment comprises:
- a second portion of the first metal layer adjacent to the first portion of the first metal layer;
- and
- a second portion of the first layer adjacent to the first portion of the first layer;
- and
- the leg structure further comprises a third segment adjacent to the first segment, wherein the third segment comprises:
- a third portion of the first metal layer adjacent to the first portion of the first metal layer;
- and
- a third portion of the first layer adjacent to the first portion of the first layer.
15 more elements
An infrared imaging device comprising:
- a substrate comprising a plurality of contacts and a surface, wherein the surface defines a plane;
- and
- a microbolometer array coupled to the substrate, wherein the microbolometer array comprises a plurality of microbolometers, and wherein each microbolometer comprises:
- a bridge;
- and
- a leg structure coupled to the bridge and to one of the plurality of contacts, wherein the leg structure comprises a first segment having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane, wherein the first dimension is less than the second dimension, wherein the first segment comprises at least a portion of a first metal layer and at least a portion of a first layer formed on a first side of the first metal layer, wherein no portion of the first layer is disposed on a top surface of the first metal layer and/or no portion of the first layer is disposed on a bottom surface of the first metal layer, wherein the top surface of the first metal layer faces away from the substrate, and wherein the bottom surface of the first metal layer faces the substrate.
3 more elements
Dependencies are inferred from the claim text.