Systems and methods for microfluidic thermal management

A thermal management device comprising:

• a microfluidic volume having a first peripheral side and a second peripheral side and including at least one thermal element, wherein the microfluidic volume is at least partially defined by an integrated circuit substrate;
• a first port to the microfluidic volume;
• a second port from the microfluidic volume;
• an inlet valve at the first port to the microfluidic volume;
• an outlet valve at the second port;
• and
• a valve piezoelectric element in mechanical communication with a portion of at least one of the inlet valve and the outlet valve to move at least the portion of the at least one of the inlet valve and the outlet valve and selectively allow fluid flow through the microfluidic volume, wherein the thermal management device has a first state in which the inlet valve is open and the outlet valve is closed to allow the fluid flow into the microfluidic volume and a second state in which the inlet valve is closed and the outlet valve is open to allow the fluid flow out of the microfluidic volume.