Wiring substrate and method for manufacturing the same
AssigneeIbiden Co., Ltd.
InventorsKentaro Wada, Koji Kondo, Kenji Kunieda, Masashi Umetsu, Yuta Okaga
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AssigneeIbiden Co., Ltd.
InventorsKentaro Wada, Koji Kondo, Kenji Kunieda, Masashi Umetsu, Yuta Okaga
Estimating the term…
A wiring substrate includes insulating layers including a first insulating layer and a second insulating layer, conductive layers including a first conductive layer including a pad and a second conductive layer, a coating film covering the first conductive layer including the pad and improving adhesion between the first conductive layer and the second insulating layer, and a via conductor formed in a through hole penetrating through the second insulating layer and the coating film on the pad and connecting the pad and the second conductive layer. The pad has a surface formed such that a root mean square roughness of the surface is in a range of 0.10 μm to 0.23 μm, and a peeling part is formed between the pad and the second insulating layer such that the peeling part is formed within 15 μm around an outer edge of the through hole on the surface of the pad.
A wiring substrate, comprising:
A method for manufacturing a wiring substrate, comprising:
Dependencies are inferred from the claim text.