Method for producing optoelectronic devices
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMaryse Fournier, Badhise Ben Bakir, Sergio Nicoletti
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMaryse Fournier, Badhise Ben Bakir, Sergio Nicoletti
Estimating the term…
A method for manufacturing a first optoelectronic device operating at a wavelength λ1 and a second optoelectronic device operating at a wavelength λ2>λ1, the first device comprising a first stack comprising a first encapsulation layer of thickness e10 and layers of thickness e1i (i=1 . . . n), and the second device comprising a second stack comprising a second encapsulation layer of thickness e20 and layers of thickness e2i (i=1 . . . n). The method includes forming the second stack by sizing the thicknesses e20 and e2i according to λ2, forming the first stack by sizing the thicknesses e1i by homothety and adjusting the thickness e10 such that the stacks have the same height, and performing out one same technological step on the stacks.
A method for manufacturing at least one first optoelectronic device operating at a first wavelength λ1 and a second optoelectronic device operating at a second wavelength λ2>λ1, the first optoelectronic device comprising a first stack along a direction z on a first substrate, the first stack comprising a first lower encapsulation layer of thickness e10 along the direction z and a plurality of first layers of thickness e1i (i=1 . . . n) along the direction z, and the second optoelectronic device comprising a second stack along the direction z on a second substrate, the second stack comprising a second lower encapsulation layer of thickness e20 along the direction z and a plurality of second layers of thickness e2i (i=1 . . . n) along the direction z, said second layers of thickness e2i having optical functions similar to those of the first layers of thickness e1i, the method comprising:
A system for manufacturing at least one first optoelectronic device operating at a first wavelength λ1 and a second optoelectronic device operating at a second wavelength λ2>λ1, the system comprising at least one first substrate carrying a first stack along a direction z comprising a first lower encapsulation layer of thickness e10 along the direction z and a plurality of first layers of thickness e1i (i=1 . . . n) along the direction z, and a second substrate carrying a second stack along the direction z comprising a second lower encapsulation layer of thickness e20 along the direction z and a plurality of second layers of thickness e2i (i=1 . . . n) along the direction z, said second layers of thickness e2i having optical functions similar to those of the first layers of thickness e1i, the thicknesses e10, e20 and e1i, e2i satisfying the following relationships:
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