Transverse magnetic mode split post dielectric resonator
AssigneeThe Curators of the University of Missouri
InventorsDongHyun Kim, Xiaoning Ye, Chaofeng Li
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Abstract
A device for measuring a property of a substrate comprises an enclosure, two resonators, and two probes. The substrate has a top surface, and the enclosure defines a cavity for placing the substrate. The resonators extend into the cavity of the enclosure. The probes extend into the cavity, and each of the probes comprises a loop that extends about an axis that is substantially parallel to the top surface of the substrate so that the probes are operable to excite a transverse magnetic mode signal in the cavity.
Claims26
A device for measuring a property of a substrate having a top surface, the device comprising:
- an enclosure defining a cavity for placing the substrate;
- two or more resonators extending into the cavity of the enclosure;
- and
- two or more probes extending into the cavity, each of the two or more probes comprising a loop that extends about an axis that is substantially parallel to the top surface of the substrate so that the two or more probes are operable to excite a transverse magnetic mode signal in the cavity.
A method of measuring a property of a substrate, the method comprising:
- exciting a transverse-magnetic mode signal, via two or more loop probes that extend about axes that are parallel to a top surface of the substrate, in an enclosure containing the substrate;
- detecting, via two or more dielectric resonators, a responsive signal in the enclosure;
- and
- determining the property of the substrate based at least in part on the responsive signal.
A system for measuring an effective permittivity and loss tangent of a inhomogeneous substrate having a top surface, the system comprising:
- an enclosure defining a cavity for placing the substrate;
- two or more resonators extending into the cavity of the enclosure;
- two or more probes extending into the cavity, each of the two or more probes comprising a loop that extends about an axis that is substantially parallel to the top surface of the substrate;
- a network analyzer in communication with the two or more resonators, the network analyzer being configured to-
- excite a transverse-magnetic mode signal, via the two or more probes, in the cavity, and
- detect, via the two or more resonators, a responsive signal in the enclosure;
- and
- a processing element in communication with the network analyzer and configured to determine the effective permittivity and the loss tangent of the substrate based at least in part on the responsive signal.
Dependencies are inferred from the claim text.