Gas cooled high power connection rod

A radio frequency (RF) power connection rod for use with a process chamber, comprising:

• a first connection rod having a first connection end, a first socket end opposite the first connection end, and a first hollow portion extending from the first connection end to the first socket end, wherein an inner diameter of the first hollow portion is larger than a wall thickness of the first hollow portion throughout the first hollow portion;
• a second connection rod having a second connection end, a second socket end opposite the second connection end, and a second hollow portion extending from the second connection end to the second socket end, wherein the second connection end is adjustably coupled to the first connection end along an axial direction of the second connection rod, and wherein an inner diameter of the first connection end is substantially constant and an outer diameter of the second connection end is substantially constant;
• a first plug rotatably coupled to the first socket end about an axis orthogonal to the axial direction of the second connection rod via an opening in the first socket end;
• and
• a second plug rotatably coupled to the second socket end about an axis orthogonal to the axial direction of the second connection rod via a second opening in the second socket end.

A process chamber, comprising:

• a chamber body having an interior volume therein;
• a substrate support disposed in the interior volume;
• an RF power supply coupled to the chamber body;
• and
• an RF power connection rod coupled to the RF power supply to provide RF power to the substrate support, the RF power connection rod, comprising:
• a first connection rod having a first connection end, a first socket end opposite the first connection end, and a first hollow portion extending from the first connection end to the first socket end;
• a second connection rod having a second connection end, a second socket end opposite the second connection end, and a second hollow portion extending from the second connection end to the second socket end, wherein the second connection end is adjustably coupled to the first connection end along an axial direction of the second connection rod, and wherein a gas flow path extends from one or more gas inlets of the first connection rod, through the first hollow portion to the second hollow portion, to one or more gas outlets disposed through the second connection rod;
• a first plug rotatably coupled to the first socket end via an opening through the first socket end, wherein a central axis of the opening extends along an axis orthogonal to the axial direction of the second connection rod;
• a second plug rotatably coupled to the second socket end via an opening through the second socket end, wherein a central axis of the opening extends along an axis orthogonal to the axial direction of the second connection rod;
• and
• a housing coupled to the first socket end via the first plug, wherein the housing includes a bottom plate and a wall extending from the bottom plate.