Information processing device, substrate processing device, and information processing method

An information processing device, generating a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device, the substrate processing device comprising:

• one or more substrate processing units, performing a substrate process on the substrate and accessible to a substrate processing unit delivery position for delivering the substrate;
• a first transport unit, performing a pre-processing transport process that transports the substrate before the substrate process from a first transport start position to a first transport end position;
• a second transport unit, comprising a plurality of transport mechanisms which perform a pre-processing loading process that transports the substrate before the substrate process from a transfer robot delivery position to the substrate processing unit delivery position, and a post-processing unloading process that transports the substrate after the substrate process from the substrate processing unit delivery position to the transfer robot delivery position;
• a third transport unit, performing a post-processing transport process that transports the substrate after the substrate process from a third transport start position to a third transport end position;
• and
• a transfer robot, performing a pre-processing transfer process that receives the substrate before the substrate process from the first transport unit at the first transport end position and delivers the substrate before the substrate process to the second transport unit at the transfer robot delivery position, and a post-processing transfer process that receives the substrate after the substrate process from the second transport unit at the transfer robot delivery position and delivers the substrate after the substrate process to the third transport unit at the third transport start position, and the information processing device comprising:
• a substrate processing time acquisition part, acquiring processing time required for the substrate process based on recipe information indicating processing content of the substrate process;
• a transport processing time acquisition part, acquiring transport time required for each of the pre-processing transport process, the pre-processing transfer process, the pre-processing loading process, the post-processing unloading process, the post-processing transfer process, and the post-processing transport process;
• and
• a schedule generation part, generating a substrate processing schedule by setting a processing order condition which determines order in which the respective processes are performed, a simultaneous processing condition which determines which processes are capable or incapable of being performed simultaneously among the respective processes, and a transfer processing priority condition which specifies that the pre-processing transfer process is prioritized over a post-processing transfer process as constraint conditions for mathematical optimization, setting final processing end time for the substrate of the last that comprises the processing time and the transport time as variables as an objective function of the mathematical optimization, and performing the mathematical optimization which determines start timings of the respective processes.

A substrate processing device, comprising:

• one or more substrate processing units, performing a substrate process on a substrate and accessible to a substrate processing unit delivery position for delivering the substrate;
• a first transport unit, performing a pre-processing transport process that transports the substrate before the substrate process from a first transport start position to a first transport end position;
• a second transport unit, comprising a plurality of transport mechanisms which perform a pre-processing loading process that transports the substrate before the substrate process from a transfer robot delivery position to the substrate processing unit delivery position, and a post-processing unloading process that transports the substrate after the substrate process from the substrate processing unit delivery position to the transfer robot delivery position;
• a third transport unit, performing a post-processing transport process that transports the substrate after the substrate process from a third transport start position to a third transport end position;
• a transfer robot, performing a pre-processing transfer process that receives the substrate before the substrate process from the first transport unit at the first transport end position and delivers the substrate before the substrate process to the second transport unit at the transfer robot delivery position, and a post-processing transfer process that receives the substrate after the substrate process from the second transport unit at the transfer robot delivery position and delivers the substrate after the substrate process to the third transfer unit at the third transport start position;
• and
• a control unit, controlling operations of the substrate processing unit, the first to third transfer units, and the transfer robot so that when sequentially performing the respective processes on a predetermined number of the substrates, the pre-processing transfer process is prioritized over the post-processing transfer process.

An information processing method, generating a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device, the substrate processing device comprising:

• one or more polishing units, performing a polishing process on the substrate and accessible to a polishing unit delivery position for delivering the substrate;
• one or more finishing units, performing a finishing process on the substrate after the polishing process;
• a first transport unit, performing a pre-polishing transport process that transports the substrate before the polishing process from a first transport start position to a first transport end position;
• a second transport unit, comprising a plurality of transport mechanisms which perform a pre-polishing loading process that transports the substrate before the polishing process from a transfer robot delivery position to the polishing unit delivery position, and a post-polishing unloading process that transports the substrate after the polishing process from the polishing unit delivery position to the transfer robot delivery position;
• a third transport unit, performing a post-polishing transport process that transports the substrate after the polishing process from a third transport start position to the finishing unit;
• a supply/discharge robot, performing a substrate supply process that takes out the substrate before the polishing process from a substrate cassette and supplies the substrate before the polishing process to the first transport unit and a substrate discharge process that receives the substrate after the finishing process from the finishing unit and storing the substrate after the finishing process in the substrate cassette;
• and
• a transfer robot, performing a pre-polishing transfer process that receives the substrate before the polishing process from the first transport unit at the first transport end position and delivers the substrate before the polishing process to the second transport unit at the transfer robot delivery position and a post-polishing transfer process that receives the substrate after the polishing process from the second transport unit at the transfer robot delivery position and delivers the substrate after the polishing process to the third transport unit at the third transport start position, and the information processing method comprising:
• a substrate processing time acquisition process, acquiring polishing time required for the polishing process and finishing time required for the finishing process based on recipe information indicating processing content of the polishing process and the finishing process;
• a transport processing time acquisition process, acquiring transport time required for each of the substrate supply process, the pre-polishing transport process, the pre-polishing transfer process, the pre-polishing loading process, the post-polishing unloading process, the post-polishing transfer process, the post-polishing transport process, and the substrate discharge process;
• and
• a schedule generation process, generating a substrate processing schedule by setting a processing order condition which determines order in which the respective processes are performed, a simultaneous processing condition which determines which processes are capable or incapable of being performed simultaneously among the respective processes, and a transfer processing priority condition which specifies that the pre-polishing transfer process is prioritized over the post-polishing transfer process as constraint conditions for mathematical optimization, setting final processing end time for the substrate of the last that comprises the polishing time, the finishing time, and the transport time as variables as an objective function of the mathematical optimization, and performing the mathematical optimization which determines start timings of the respective processes.

An information processing method, generating a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device, the substrate processing device comprising:

• one or more substrate processing units, performing a substrate process on the substrate and accessible to a substrate processing unit delivery position for delivering the substrate;
• a first transport unit, performing a pre-processing transport process that transports the substrate before the substrate process from a first transport start position to a first transport end position;
• a second transport unit, comprising a plurality of transport mechanisms which perform a pre-processing loading process that transports the substrate before the substrate process from a transfer robot delivery position to the substrate processing unit delivery position, and a post-processing unloading process that transports the substrate after the substrate process from the substrate processing unit delivery position to the transfer robot delivery position;
• a third transport unit, performing a post-processing transport process that transports the substrate after the substrate process from a third transport start position to a third transport end position;
• and
• a transfer robot, performing a pre-processing transfer process that receives the substrate before the substrate process from the first transport unit at the first transport end position and delivers the substrate before the substrate process to the second transport unit at the transfer robot delivery position, and a post-processing transfer process that receives the substrate after the substrate process from the second transport unit at the transfer robot delivery position and delivers the substrate after the substrate process to the third transport unit at the third transport start position, and the information processing method comprising:
• a substrate processing time acquisition process, acquiring processing time required for the substrate process based on recipe information indicating processing content of the substrate process;
• a transport processing time acquisition process, acquiring transport time required for each of the pre-processing transport process, the pre-processing transfer process, the pre-processing loading process, the post-processing unloading process, the post-processing transfer process, and the post-processing transport process;
• and
• a schedule generation process, generating a substrate processing schedule by setting a processing order condition which determines order in which the respective processes are performed, a simultaneous processing condition which determines which processes are capable or incapable of being performed simultaneously among the respective processes, and a transfer processing priority condition which specifies that the pre-processing transfer process is prioritized over a post-processing transfer process as constraint conditions for mathematical optimization, setting final processing end time for the substrate of the last that comprises the processing time and the transport time as variables as an objective function of the mathematical optimization, and performing the mathematical optimization which determines start timings of the respective processes.