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US 12,663,720 B2Granted
Apparatus for supplying liquid and apparatus for treating substrate
AssigneesSemes Co., Ltd., Seoul National University R&Db Foundation
InventorsJung Suk Goh, A Rah Cho, Woo Sin Jung, Dae Sung Kim, Hae Kyung Kim, Hyungmin Park, Jungjin Lee, Linfeng Piao, Jubeom Lee
Life of this patent
Estimating the term…
Abstract
Provided is a liquid supplying apparatus including: a trap tank for receiving a liquid from a storage bottle in which the liquid is stored and accommodating the received liquid; a pipe for connecting the storage bottle and the trap tank; and a valve installed on the pipe and for opening and closing a flow path of the pipe, in which the valve is installed closer to the storage bottle than the trap tank.
Claims14
A liquid supplying apparatus, comprising:
- a trap tank configured to receive a liquid from a storage bottle in which the liquid is stored, the trap tank configured to accommodate the received liquid;
- a pipe connecting the storage bottle and an upper portion of the trap tank;
- and
- a valve on the pipe and configured to open and close a flow path of the pipe,
- wherein the valve is closer to the storage bottle than the trap tank,
- wherein the pipe includes:
- a first pipe connecting the valve and the trap tank;
- and
- an adapter directly connecting the storage bottle and the valve, wherein the adapter is L-shaped,
- wherein the valve is above the storage bottle,
- wherein the valve is upstream from the first pipe and one end of the adapter is directly connected to the valve,
- wherein the first pipe has a partial section located lower than the storage bottle and the trap tank, and
- wherein the first pipe has another section, continuous with and upstream from the partial section, an end of the another section above the storage bottle and the trap tank.
10 more elements
A substrate treating apparatus, comprising:
- a support unit configured to maintain a substrate horizontally;
- a nozzle configured to supply a liquid to the substrate;
- and
- a liquid supplying apparatus configured to supply the liquid to the nozzle,
- wherein the liquid supplying apparatus includes:
- a trap tank configured to receive the liquid from a storage bottle in which the liquid is stored and configured to accommodate the received liquid;
- a pipe connecting the storage bottle and an upper portion of the trap tank;
- and
- a valve on the pipe and configured to open and close a flow path of the pipe, and
- the valve is closer to the storage bottle than the trap tank,
- wherein the pipe includes:
- a first pipe connecting the valve and the trap tank;
- and
- an adapter directly connecting the storage bottle and the valve, wherein the adapter is L-shaped,
- wherein the valve is above the storage bottle,
- wherein the valve is upstream from the first pipe and one end of the adapter is directly connected to the valve,
- wherein the first pipe has a partial section located lower than the storage bottle and the trap tank, and
- wherein the first pipe has another section, continuous with and upstream from the partial section, an end of the another section above the storage bottle and the trap tank.
15 more elements
A substrate treating apparatus, comprising:
- a support unit configured to maintain a substrate horizontally;
- a nozzle configured to supply a liquid to the substrate;
- and
- a liquid supplying apparatus configured to supply the liquid to the nozzle,
- wherein the liquid supplying apparatus includes:
- a trap tank configured to accommodate the liquid;
- a first pipe connecting a first storage bottle and the trap tank;
- a second pipe connecting a second storage bottle and the trap tank;
- a first valve on the first pipe and configured to open and close a flow path of the first pipe;
- and
- a second valve on the second pipe and configured to open and close a flow path of the second pipe, and
- wherein the first pipe includes:
- a first coiled pipe connecting the first valve and an upper portion of the trap tank;
- and
- a first adapter directly connecting the first storage bottle and the first valve,
- wherein the first adapter is L-shaped,
- wherein the first valve is above the first storage bottle,
- wherein the first valve is upstream the first pipe and one end of the first adapter is directly connected to the first valve,
- wherein the second pipe includes:
- a second coiled pipe connecting the second valve and the trap tank;
- and
- an second adapter connecting the second storage bottle and the second valve, wherein
- the second adapter is L-shaped,
- the second valve is above the second storage bottle,
- wherein the second valve is upstream the second pipe and one end of the second adapter is directly connected to the second valve,
- wherein a length of the flow path formed by each of the first adapter and the second adapter is 20 cm or less,
- each of the first coiled pipe and the second coiled pipe has a partial section located lower than the trap tank and a respective one of the first storage bottle or the second storage bottle, and
- the first coiled pipe has another section, continuous with and upstream from the partial section, an end of the another section above the first storage bottle.
25 more elements
Dependencies are inferred from the claim text.