Back to results
US 12,663,708 B2Granted
System and method for reducing pellicle rupture
AssigneeIntel Corporation
InventorsLance C. Hibbeler, John Ferdinand Magana, Chytra Pawashe
Life of this patent
Estimating the term…
Abstract
A reinforcement system includes a framed pellicle, which includes a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame; and an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the framed pellicle and the pellicle frame.
Claims19
A reinforcement system comprising:
- a framed pellicle comprising:
- a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame;
- an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame;
- and
- electronic circuitry disposed on or in the pellicle frame and connected to the edge reinforcement by a wire connection configured to monitor electrical continuity in the edge reinforcement and detect a rupture in the framed pellicle, wherein the wire connection is disposed, at least partially, on or in the edge reinforcement.
2 more elements
A deflection monitoring method comprising:
- providing a framed pellicle comprising:
- a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to a pellicle frame;
- and
- an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame;
- connecting electronic circuitry to the edge reinforcement by a wire connection;
- providing a deflection measure means on the edge reinforcement and connecting the deflection measure means to the electronic circuitry;
- periodically measuring a voltage generated by the deflection measure means;
- and
- detecting a pellicle deflection in the edge reinforcement by a measured increased voltage above a predetermined threshold.
6 more elements
A rupture determination method comprising:
- providing a framed pellicle comprising:
- a center part of a pellicle surrounded by a peripheral part of the pellicle, wherein the peripheral part is adhered to the pellicle frame;
- and
- an edge reinforcement for reinforcing the framed pellicle, positioned at a boundary between the center part of the pellicle and the pellicle frame;
- connecting electronic circuitry to the edge reinforcement by a wire connection, wherein the electronic circuitry is disposed on or in the pellicle frame, wherein the wire connection is disposed, at least partially, on or in the edge reinforcement;
- monitoring an electrical continuity in the edge reinforcement by the electronic circuitry;
- and
- detecting a pellicle rupture in the edge reinforcement by detection of an interrupted electronic circuit.
5 more elements
Dependencies are inferred from the claim text.