Imaging device and method for holographic imaging of samples
AssigneeImec Vzw
InventorsZiduo Lin, Richard Stahl, Geert Vanmeerbeeck, Abdulkadir Yurt
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AssigneeImec Vzw
InventorsZiduo Lin, Richard Stahl, Geert Vanmeerbeeck, Abdulkadir Yurt
Estimating the term…
Embodiments of the present disclosure provide an imaging device for holographic imaging of a sample, the imaging device comprising a light source generating a light beam, a beam splitter splitting the light beam into an object beam along an object beam path and a reference beam along a reference beam path, and a detector. The imaging device defines a sample position. The object beam is propagated through the sample position, and the detector is arranged to prevent non-scattered object light, passing through the sample position without being scattered by the sample, from being incident onto the detector. The reference beam is propagated through the sample position, and the detector is arranged so that non-scattered reference light, passing through the sample position without being scattered by the sample, is incident onto the detector. The detector detects an interference pattern formed by scattered object light and the non-scattered reference light.
An imaging device for holographic imaging of a sample, the imaging device comprising:
A method for holographic imaging of a sample located in a sample position, the method comprising:
Dependencies are inferred from the claim text.