Voice coil leaf spring prober
AssigneeMACOM Technology Solutions Holdings, Inc.
InventorsTimothy James Vanderwerf, Alex G Chernyakov
Life of this patent
Estimating the term…
Abstract
Aspects of the present disclosure describe a voice coil actuated leaf spring prober that advantageously may be operated to probe every individual device (device under test—DUT) comprising a contemporary wafer. The prober according to aspects of the present disclosure includes one or more probe needles attached in an electrically isolated arrangement to an end of a horizontal-U-shaped, recurved, leaf spring arrangement. The prober includes—for example—a voice coil actuator positioned within the horizontal-U-shaped portion of the leaf spring which—when operated—results in leaf spring displacement and probe needle movement such that it may mechanically/electrically contact the DUT.
Claims20
A test probe assembly comprising:
- a leaf spring;
- a needle probe mechanically attached to a distal end of the leaf spring;
- and
- an actuator operative to deflect a portion of the leaf spring and the attached needle probe;
- wherein the leaf spring exhibits a U-shape defining a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of a device under test such that the needle probe makes a scrubbing contact with the device under test.
A method of operating a test probe assembly comprising
- a U-shaped leaf spring, wherein the U-shape defines a recurved interior space;
- a needle probe mechanically attached to a distal end of the leaf spring;
- and
- an actuator operative to deflect a portion of the leaf spring and the attached needle probe;
- the method comprising
- positioning a device to be tested proximate to the test probe assembly;
- operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested;
- and
- conducting a test by applying electrical signals to the device to be tested via the needle probe;
- wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device under test such that the needle probe makes a scrubbing contact with the device to be tested.
A computer-implemented test system comprising:
- a U-shaped leaf spring;
- a needle probe mechanically attached to a distal end of the leaf spring;
- and
- an actuator operative to deflect a portion of the leaf spring and the attached needle probe;
- and
- a computer operatively connected to the actuator and needle probe and programmed to execute a computer program which when executed causes positioning a device to be tested proximate to the test probe assembly;
- operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested;
- and
- conducting a test by applying electrical signals to the device to be tested via the needle probe;
- wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device under test such that the needle probe makes a scrubbing contact with the device to be tested.
A non-transitory computer storage medium having computer executable instructions which when executed by a computer cause the computer to perform operations for a computer-implemented test system comprising:
- a U-shaped leaf spring;
- a needle probe mechanically attached to a distal end of the leaf spring;
- and
- an actuator operative to deflect a portion of the leaf spring and the attached needle probe;
- and
- a computer operatively connected to the actuator and needle probe and when operated according to the executable instructions causes
- positioning a device to be tested proximate to the test probe assembly;
- operating the actuator to deflect a portion of the leaf spring and the attached needle probe such that the needle probe mechanically and electrically contacts a test pad on the device to be tested;
- and
- conducting a test by applying electrical signals to the device to be tested via the needle probe;
- wherein the leaf spring U-shape defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of the device to be tested such that the needle probe makes a scrubbing contact with the device to be tested.
A test probe arrangement comprising:
- a leaf spring;
- a needle probe mechanically attached to a distal end of the leaf spring;
- and
- an actuator operative to deflect a portion of the leaf spring and the attached needle probe;
- wherein the distal end of the leaf spring is bent, such that the attached needle probe is less than 90 degrees off horizontal;
- wherein the leaf spring exhibits a U-shape that defines a recurved interior space, the actuator is a voice coil actuator at least partially disposed within the recurved interior space of the leaf spring, and the needle probe is oriented at an angle relative to a horizontal surface of a device under test such that the needle probe makes a scrubbing contact with the device under test.
Dependencies are inferred from the claim text.