System and method for scanning near-field optical microscopy
AssigneeBrown University
InventorsDaniel Mittleman, Angela Pizzuto
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AssigneeBrown University
InventorsDaniel Mittleman, Angela Pizzuto
Estimating the term…
A method for scanning near-field optical microscopy comprises illuminating an apertureless atomic force microscopy (AFM) probe with electromagnetic energy having a frequency in the Terahertz range, where the sample under observation includes a dielectric layer having a thickness greater than the radius of the tip of the AFM probe. A system for scanning near-field optical microscopy comprises a collimated light source for emitting collimated light, a photoconductive antenna for converting collimated light into electromagnetic energy having a frequency in the Terahertz range, an AFM probe, a sample comprising a dielectric layer, the dielectric layer having a thickness greater than the radius of the probe tip; and a detector configured to detect energy that has interacted with the sample.
A method for imaging metallic patterns deposited on a surface of semiconductor materials, the method comprising:
A method for non-destructive testing using an atomic force microscope (AFM) probe, the AFM probe having a probe tip, the probe tip having a radius, the method comprising the steps of:
A system for scanning near-field optical microscopy comprising:
Dependencies are inferred from the claim text.