Sensor and sensor system
AssigneeKabushiki Kaisha Toshiba
InventorYumi Hayashi
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a sensor includes a base, a base including a first region and a second region, a fixed electrode fixed to the first region, a first fixed portion fixed to the second region, a first support portion, and a movable portion. The first support portion is connected to the first fixed portion. The first support portion includes a first support layer and a first layer fixed to the first support layer. The first layer includes at least one metal selected from the group consisting of Pt, Pd and Ti, and oxygen. The movable portion is supported by the first support portion. A first gap is provided between the fixed electrode and the movable portion.
Claims19
A sensor, comprising:
- a base including a first region and a second region;
- a fixed electrode fixed to the first region;
- a first fixed portion fixed to the second region;
- a first support portion connected to the first fixed portion, the first support portion including a first support layer and a first layer fixed to the first support layer, the first layer including at least one metal selected from the group consisting of Pt, Pd and Ti, and oxygen;
- and
- a movable portion supported by the first support portion, a first gap being provided between the fixed electrode and the movable portion,
- wherein
- the first layer includes a first face and a first portion,
- the first portion is between the first support layer and the first face,
- the first portion is a center of the first layer in a first direction from the first support layer to the first face, and
- a ratio of an absolute value of a difference between a first portion concentration of oxygen in the first portion and a first face concentration of oxygen in the first face to the first portion concentration is not less than 0.1 and not more than 10.
Dependencies are inferred from the claim text.